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M5111-4WP/UM Closed three-stack soft landing diffusion/oxydation system
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M5111-4WP/UM Closed three-stack soft landing diffusion/oxydation system

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China

Model No:

M5111-4WP/UM

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Contact Person Tina

Tongzipo West Road, Changsha National High-tech Industry Development Zone, Changsha, Hunan

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Product Specification

Product Description

The system adopts closed diffusion (cleaning diffusion). The SiC cantilever paddle retreats from quartz tube during the process. Pressure self-balancing system with independent intellectual property rights, quick re-warming system and unique gas feeding way are applied, protecting the process from ambient influences, hence improving the diffusion quality. The throughput is **0pcs/batch.

Country: China
Model No: M5111-4WP/UM
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Place of Origin: -
Price for Minimum Order: -
Minimum Order Quantity: -
Packaging Detail: -
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Tina < Hunan Red Solar New Energy Science and Technology Co., Ltd. >

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